Concepedia

Publication | Closed Access

Atomic layer deposition of CeO2/HfO2 gate dielectrics on Ge substrate

DOI

17

Citations

30

References

2014

Year

Wan Joo Maeng, Il‐Kwon Oh, Woo‐Hee Kim, Min‐Kyu Kim, Chang-Wan Lee, Clément Lansalot‐Matras, David Thompson, Schubert Chu, Hyungjun Kim
Applied Surface Science

References

YearCitations

Page 1