Wan Joo Maeng

Highly Conducting, Transparent, and Flexible Indium Oxide Thin Film Prepared by Atomic Layer Deposition Using a New Liquid Precursor Et₂InN(SiMe₃)₂

Wan Joo Maeng, Dongwon Choi, Kwun‐Bum Chung et al. · ACS Applied Materials & Interfaces · 2014 · 66 citations

Thin Film Physics, Engineering, Thin Film Process Technology +17

Atomic layer deposition of Y-stabilized ZrO2 for advanced DRAM capacitors

Bo-Eun Park, Il‐Kwon Oh, Chandreswar Mahata et al. · Journal of Alloys and Compounds · 2017 · 57 citations

Materials Science, Electrical Engineering, Engineering +6

Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process

Woo‐Hee Kim, Il-Kwon Oh, Min‐Kyu Kim et al. · Journal of Materials Chemistry C · 2014 · 32 citations

Engineering, Boron-doped Sio2 Films, Chemical Engineering +16

In situ surface cleaning on a Ge substrate using TMA and MgCp₂for HfO₂-based gate oxides

Il‐Kwon Oh, Kangsik Kim, Zonghoon Lee et al. · Journal of Materials Chemistry C · 2015 · 22 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Significant Enhancement of the Dielectric Constant through the Doping of <scp> <scp>CeO</scp> </scp> ₂ into <scp> <scp>HfO</scp> </scp> ₂ by Atomic Layer Deposition

Woo‐Hee Kim, Min‐Kyu Kim, Il‐Kwon Oh et al. · Journal of the American Ceramic Society · 2014 · 19 citations