Publication | Closed Access
Measurement of thermal expansion coefficient of poly-Si using microgauge sensors
46
Citations
5
References
1999
Year
Electrical EngineeringEngineeringMicrogauge SensorsSensorsMeasurementMicrofabricationSilicon On InsulatorApplied PhysicsEducationThermal AnalysisSensor DesignInstrumentationThermal SensorThermal EngineeringSensor Technology
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