Microfluidics and Nanofluidics · 2010 · 18 citations · 26 references
Natural SciencesPhysicsComputational Materials ScienceMicroelectromechanical SystemsMolecular PhysicsDevice SimulationMolecular MechanicsMicroresonator SimulationMicroresonatorsMonte Carlo Simulation ModelingResonator ModelingResonator SimulationSqueeze-film DampingSqueeze-film Damping Effects
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Micromachined inertial sensors
N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations
Engineering, Electrical Engineering, Mechanical Engineering +17