Publication | Closed Access
Ultra-thin oxides grown on silicon (1 0 0) by rapid thermal oxidation for CMOS and advanced devices
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Citations
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References
2001
Year
Materials ScienceElectrical EngineeringEngineeringRapid Thermal OxidationOxide ElectronicsApplied PhysicsSemiconductor Device FabricationUltra-thin OxidesMicroelectronicsBeyond CmosSilicon On InsulatorSemiconductor Device
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