Publication | Closed Access
SiO2 deposition by direct photolysis at 185 nm of N2O and SiH4
17
Citations
8
References
1990
Year
Direct PhotolysisEngineeringPhotochemistrySurface ScienceApplied PhysicsPhoto-electrochemical CellChemistrySio2 DepositionSilicon On InsulatorOptoelectronicsChemical Vapor Deposition
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