Microsystem Technologies · 1996 · 26 citations · 13 references
EngineeringMaterials ScienceMechanical EngineeringMetrologyNanotechnologyOpticsDeflection Of BeamsNanomechanical PropertiesNanomechanicsOptical MetrologyPlastic DeformationStrain MeasurementHigh-resolution Strain MeasurementNanometer-scale Displacement MeasurementNanometer-scale Metrology
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