Optimization of near-infrared laser drilling of silicon carbide under water

Polarization effects in ultrashort-pulse laser drilling

Stefan Nolte, C. Momma, G. Kamlage et al. · Applied Physics A · 1999 · 174 citations

Engineering, Electrical Engineering, Drilling +11

Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication

Ben Pecholt, Monica Vendan, Yuanyuan Dong et al. · The International Journal of Advanced Manufacturing Technology · 2007 · 94 citations

Engineering, Materials Engineering, Materials Science +13

Laser micro machining of 3C–SiC single crystals

S. Zoppel, Maria Farsari, R. Merz et al. · Microelectronic Engineering · 2006 · 73 citations

Engineering, Materials Engineering, Materials Science +14

In situ imaging of hole shape evolution in ultrashort pulse laser drilling

Sven Döring, Sören Richter, Stefan Nolte et al. · Optics Express · 2010 · 67 citations · Full text

Engineering, Biomedical Engineering, Biomedical Imaging +9

Inductively coupled plasma etching of bulk 6H-SiC and thin-film SiCN in NF3 chemistries

J. J. Wang, E. S. Lambers, S. J. Pearton et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 64 citations

Natural Sciences, Materials Engineering, Materials Science +14