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New magnetron configurations for sputtered Nb onto Cu

G. Lanza, J. Bermudez, Alessandro Frigo, H. Padamsee, V. Palmieri, D. Tonini

Physica C Superconductivity · 2006 · 11 citations · 6 references

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References

6

Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

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Handbook of thin film process technology

W Steckelmacher · Vacuum · 1996 · 285 citations

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The science and technology of superconducting cavities for accelerators

H. Padamsee · Superconductor Science and Technology · 2001 · 139 citations

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Current–voltage relations in magnetrons

S. M. Rossnagel, H. R. Kaufman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 125 citations

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Radial current distribution at a planar magnetron cathode

A. Wendt, M. A. Lieberman, H. Meuth · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 102 citations

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