Microscopy and Microanalysis · 2005 · 96 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicrofabricationAmorphous SemiconductorsMachiningMicrofabrication MaterialsMicrofabrication ProcessesAmorphous RegionsElectron Probe MicroanalysisMicroanalysisMicroscopic Material AnalysisMillingMilling Processes
Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005