Applied Physics Letters · 1980 · 124 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsDopingEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor PhysicsEpitaxial Growth KineticsMolecular Beam EpitaxyMolecular Beam ExperimentsQuantum Well GrowthQuantum Well Growth TechniquesSite OccupancyTemperature Effects On GrowthTraps
By using a single Knudsen source independently to generate molecular beams of As2 and As4 from elemental arsenic, a direct correlation has been observed between the arsenic species used and deep level concentrations in molecular beam epitaxy grown n-type GaAs films. Some preliminary observations on comparative growth temperature effects and Ge site occupancy are also reported.
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Study of electron traps in <i>n</i>-GaAs grown by molecular beam epitaxy
D. V. Lang, A. Y. Cho, A. C. Gossard et al. · Journal of Applied Physics · 1976 · 203 citations