Publication | Closed Access
Microcrystalline silicon deposited by glow discharge decomposition of heavily diluted silane
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Citations
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References
1992
Year
Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringGlow Discharge DecompositionMicrofabricationNanoelectronicsGlow DischargeApplied PhysicsSiliceneSemiconductor Device FabricationIntegrated CircuitsMicrocrystalline SiliconSilicon On InsulatorMicroelectronicsSilicon Debugging
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