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Investigation of the size-dependent dynamic characteristics of atomic force microscope microcantilevers based on the modified couple stress theory

Materials ScienceSize-dependent Dynamic CharacteristicsEngineeringMicromechanicsMicrofabricationMechanicsMechanical EngineeringApplied PhysicsScanning Force MicroscopyExperimental MechanicSolid MechanicsMicrostructure-strength RelationshipNanomechanicsMechanics Of MaterialsMicrostructure