Electronics Letters · 1990 · 111 citations · 8 references
EngineeringElectrical EngineeringMaterials ScienceOptoelectronicsSemiconductor DevicesSemiconductor MaterialsEtching ProcessesIntegrated Circuit FabricationOptoelectronic DevicesQuantum Well DevicesQuantum WellsSemiconductor LasersDevice FabricationDry EtchingEtchingIntegrated LasersLow-threshold Current LasersMonolithic ArchitectureQuantum Well LasersSemiconductor Laser Fabrication
Semiconductor ring lasers have been fabricated in single quantum well material using electron-beam lithography and SiCl4 dry etching. CW operation has been achieved in 84 μm diameter rings at a threshold current of 24 mA. This low value makes the structure very suitable for monolithic integration in optoelectronic circuits.
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Conference on lasers and electro-optics 82
SLB · Optics & Laser Technology · 1982 · 1.3K citations
Semiconductor injection lasers with a circular resonator
Andrew Liao, Shyh Wang · Applied Physics Letters · 1980 · 67 citations
Integrated semiconductor ring lasers
A. Jezierski, P.J.R. Laybourn · IEE Proceedings J Optoelectronics · 1988 · 28 citations