Publication | Closed Access
CW operation of semiconductor ring lasers
109
Citations
8
References
1990
Year
Categoryquantum ElectronicsEngineeringLaser ScienceElectron-beam LithographyLaser ApplicationsOptoelectronic DevicesIntegrated CircuitsElectronic DevicesSemiconductor LasersCompound SemiconductorSicl4 Dry EtchingPhotonicsQuantum DeviceOptoelectronic MaterialsSemiconductor Device FabricationSingle QuantumSemiconductor Ring LasersApplied PhysicsOptoelectronics
Semiconductor ring lasers have been fabricated in single quantum well material using electron-beam lithography and SiCl4 dry etching. CW operation has been achieved in 84 μm diameter rings at a threshold current of 24 mA. This low value makes the structure very suitable for monolithic integration in optoelectronic circuits.
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