Publication | Open Access
Atom lithography of Fe
49
Citations
13
References
2004
Year
EngineeringElectron-beam LithographyMagnetic ResonanceAtom LithographyAtom BeamMagnetismBeam LithographyLithography SchemeNanolithographyNanometrologyNanolithography MethodNanophotonicsIron AtomsMaterials SciencePhysicsNanotechnologyAtomic PhysicsMagnetic MediumSpintronicsMicrofabricationApplied Physics
Direct write atom lithography is a technique in which nearly resonant light is used to pattern an atom beam. Nanostructures are formed when the patterned beam falls onto a substrate. We have applied this lithography scheme to a ferromagnetic element, using a 372nm laser light standing wave to pattern a beam of iron atoms. In this proof-of-principle experiment, we have deposited a grid of 50-nm-wide lines 186nm apart. These ultraregular, large-scale, ferromagnetic wire arrays may generate exciting new developments in the fields of spintronics and nanomagnetics.
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