Concepedia

TwinMag TM II: attempts to improve an excellent sputter tool

U Heister, J. Krempel-Hesse, J. Szczyrbowski, G. Teschner, John C. Bruch

Thin Solid Films · 1999 · 15 citations · 4 references

DOI

Concepts

References

4

Antireflective coatings on large scale substrates produced by reactive twin-magnetron sputtering

J. Szczyrbowski, G. Teschner, A. Zmelty · Journal of Non-Crystalline Solids · 1997 · 68 citations

, , +15

Magnetron sputtering on large scale substrates: an overview on the state of the art

R. Kukla · Surface and Coatings Technology · 1997 · 61 citations

, , +12

New approaches for reactive sputtering of dielectric materials on large scale substrates

J. Szczyrbowski, G. Teschner · Journal of Non-Crystalline Solids · 1997 · 41 citations

, , +15

Some properties of TiO2-layers prepared by mid-frequency and dc reactive magnetron sputtering

J. Szczyrbowski, M. Ruske, G. Teschner et al. · Journal of Non-Crystalline Solids · 1997 · 32 citations

, , +12