Finite element simulation of the development of residual stress in IAPVD films

Stress-related effects in thin films

John A. Thornton, David W. Hoffman · Thin Solid Films · 1989 · 1.1K citations

Materials Science, Engineering, Applied Physics +6

A simple model for the formation of compressive stress in thin films by ion bombardment

C. A. Davis · Thin Solid Films · 1993 · 800 citations

Materials Science, Compressive Stress, Ion Implantation +11

Stresses in thin films: The relevance of grain boundaries and impurities

R. W. Hoffman · Thin Solid Films · 1976 · 458 citations

Materials Science, Grain Boundaries, Engineering +8

An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering

H. Windischmann · Journal of Applied Physics · 1987 · 398 citations

Engineering, Forward Sputtering, Ion Beam Sputtering +18

Handbook of ion beam processing technology

J. J. Cuomo, S. M. Rossnagel, Commonwealth Scientific Corp. · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1989 · 343 citations

Materials Science, Electrical Engineering, Ion Implantation +11