Piezoelectric Microactuator Devices

Atomic Force Microscope

G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text

Natural Sciences, Materials Science, Physics +14

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

Atomic force microscope–force mapping and profiling on a sub 100-Å scale

Y. Martin, C. C. Williams, H. K. Wickramasinghe · Journal of Applied Physics · 1987 · 1.4K citations

Natural Sciences, Materials Science, Physics +17

An atomic-resolution atomic-force microscope implemented using an optical lever

S. Alexander, L. Hellemans, Othmar Marti et al. · Journal of Applied Physics · 1989 · 636 citations

Natural Sciences, Materials Science, Physics +13

Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators

S. C. Minne, Scott R. Manalis, C. F. Quate · Applied Physics Letters · 1995 · 431 citations

Engineering, Materials Science, Mechanical Engineering +17