Characterization of focused ion beam induced deposition process and parameters calibration

Focused ion beam deposition of Pt containing films

J. Puretz, L. W. Swanson · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +13

A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process

Jürgen Daniel, David F. Moore · Sensors and Actuators A Physical · 1999 · 30 citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

Focused ion-beam line profiles: A study of some factors affecting beam broadening

I. M. Templeton, H. G. Champion · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 18 citations

Natural Sciences, Materials Science, Physics +8

Focused ion beam direct deposition of superconductive thin film

Shinji Nagamachi, Yasuhiro Yamakage, Masahiro Ueda et al. · Applied Physics Letters · 1994 · 16 citations

Natural Sciences, Materials Science, Physics +15

A novel procedure for measuring the absolute current density profile of a focused gallium-ion beam

J. B. Wang, Yuh‐Lin Wang · Applied Physics Letters · 1996 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +12