Traceable calibration of transfer standards for scanning probe microscopy

GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENT

Saudi Standard · 2006 · 6.5K citations

Reliability, Engineering, Uncertainty Modeling +7

Determination and correction of quadrature fringe measurement errors in interferometers

Peter L. M. Heydemann · Applied Optics · 1981 · 412 citations

Sensor Calibration, Precision Measurement, Engineering +11

Long-range AFM profiler used for accurate pitch measurements

Felix Meli, R. Thalmann · Measurement Science and Technology · 1998 · 126 citations

Engineering, Measurement, Microscopy +18

Optical fringe subdivision with nanometric accuracy

K P Birch · Precision Engineering · 1990 · 112 citations

Photonics, Engineering, Ophthalmology +7

Real-time, interferometrically measuring atomic force microscope for direct calibration of standards

Satoshi Gonda, Takuma Doi, Tomizo Kurosawa et al. · Review of Scientific Instruments · 1999 · 110 citations

Engineering, Microscopy, Atom Interferometry +26