Ion channeling studies of low energy ion bombardment induced crystal damage in silicon - Concepedia

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Ion channeling studies of low energy ion bombardment induced crystal damage in silicon

16

Citations

17

References

1986

Year

D. J. Vitkavage, C.J. Dale, W. K. Chu, T. G. Finstad, T. M. Mayer

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Ion ImplantationEngineeringPhysicsCrystalline DefectsApplied PhysicsSingle Event EffectsIon BeamIon EmissionSilicon On InsulatorCrystal DamageSilicon Debugging

References

	Year	Citations

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