Controlled placement of an individual carbon nanotube onto a microelectromechanical structure

Abstract

We report on the precise placement of a single carbon nanotube (CNT) onto a microlectromechanial system (MEMS) structure. Using a hybrid atomic force microscope/scanning electron microscope (AFM/SEM) system, an individual multiwalled CNT was retrieved from a cartridge by the AFM tip, translated to a MEMS device, and then placed across a gap between an actuating and a stationary structure. Progress toward a resistance versus stress/strain measurement on a CNT will be discussed, including SEM images of a MEMS structure we have designed specifically for such a measurement.