Concepedia

Studies of physical and chemical properties of styrene-based plasma polymer films deposited by radiofrequency Ar/styrene glow discharge

Arup Choudhury, Joyanti Chutia, S.A. Barve, H. Kakati, Arup R. Pal, Jagannath Jagannath, N. Mithal, R. Kishore, M. Pandey, D.S. Patil

Progress in Organic Coatings · 2010 · 19 citations · 27 references

DOI

Concepts

References

27

The identification of molecular spectra

Journal of the Franklin Institute · 1951 · 2.3K citations

, , +9

Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

J. W. Coburn, Min Chen · Journal of Applied Physics · 1980 · 880 citations

, , +16

<i>Glow Discharge Processes: Sputtering and Plasma Etching</i>

B. N. Chapman, J. L. Vossen · Physics Today · 1981 · 544 citations

, , +16

Glow discharge processes; Sputtering and plasma etching

C. M. Ferrar · IEEE Journal of Quantum Electronics · 1981 · 489 citations

, , +14

Spectroscopic diagnostics of CF4-O2 plasmas during Si and SiO2 etching processes

Riccardo d’Agostino, F. Cramarossa, S. De Benedictis et al. · Journal of Applied Physics · 1981 · 303 citations

, , +16