IEEE Journal of Quantum Electronics · 1981 · 489 citations · 0 references
Natural SciencesMaterials EngineeringPhysicsElectronic MaterialsPlasma PhysicsSemiconductor DevicesHigh-temperature PlasmasPhysical Vapor DepositionPlasma SheathsPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsEtchingGlow DischargesPlasma EtchingPlasma ProcessesSputtering Processes