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<i>Glow Discharge Processes: Sputtering and Plasma Etching</i>
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1981
Year
Electrical EngineeringPlasma ElectronicsEngineeringPhysicsDc Glow DischargesGlow DischargePlasma TransportApplied PhysicsAtomic PhysicsPlasma PhysicsPlasma EtchingInstrumentationGas Discharge PlasmaPlasma ApplicationPlasma InstabilitiesPlasma ProcessingRf Discharges
Gases. Gas Phase Collision Processes. Plasmas. DC Glow Discharges. RF Discharges. Sputtering. Plasma Etching. Appendices. Index.