Concepedia

<i>Glow Discharge Processes: Sputtering and Plasma Etching</i>

B. N. Chapman, J. L. Vossen

Physics Today · 1981 · 544 citations · 0 references

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Concepts

Abstract

Concepts

Natural SciencesElectrical EngineeringPhysicsPlasma PhysicsSurface ScienceCollisions In PlasmasHigh-temperature PlasmasPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsPlasma-wall InteractionsEtchingGlow DischargesPlasma EtchingPlasma ProcessesPlasma SputteringSputtering ProcessesSputtering TechniquesSurface Sputtering

Abstract

Gases. Gas Phase Collision Processes. Plasmas. DC Glow Discharges. RF Discharges. Sputtering. Plasma Etching. Appendices. Index.