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Size effect of thermal expansion and thermal/intrinsic stresses in nanostructured thin films: Experiment and model

Materials ScienceEngineeringPhysicsNanotechnologyApplied PhysicsSize EffectThermal ConductionElectronic PackagingThin FilmsThin Film ProcessingThermal EngineeringThermal ConductivityThermal PropertyThermal ExpansionNanostructured Thin Films