A novel 6 × 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications

Surface micromachined capacitive ultrasonic transducers

I. Ladabaum, Xuecheng Jin, H. Tom Soh et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1998 · 573 citations · Full text

Natural Sciences, Mechanical Engineering, Acoustics +16

Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

Ömer Oralkan, A.S. Ergun, Jeremy A. Johnson et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2002 · 494 citations

Medicine, Bioengineering, Biomedical Engineering +17

A surface micromachined electrostatic ultrasonic air transducer

M.I. Haller, B.T. Khuri-Yakub · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1996 · 381 citations

Engineering, Electrical Engineering, Acoustics +14

Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers

Xuecheng Jin, I. Ladabaum, F. Levent Degertekin et al. · Journal of Microelectromechanical Systems · 1999 · 169 citations

Engineering, Materials Engineering, Microelectromechanical Systems +16

A Temperature Compensated Ultrasonic Sensor Operating in Air for Distance and Proximity Measurements

Claudio Canali, G. De Cicco, B. Morten et al. · IEEE Transactions on Industrial Electronics · 1982 · 89 citations · Full text

Engineering, Mechatronics Engineering, Acoustics +16