Surface micromachined capacitive ultrasonic transducers

I. Ladabaum, Xuecheng Jin, H. Tom Soh, +2

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

AeroacousticsElectrical EngineeringEnergy HarvestingEngineeringPiezoelectric Transducers +13

The microfabrication of capacitive ultrasonic transducers

Xuecheng Jin, I. Ladabaum, B.T. Khuri-Yakub

Journal of Microelectromechanical Systems

Dynamic RangesEngineeringMicromachinesUltrasonicsMicrofabrication +11

Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers

Xuecheng Jin, I. Ladabaum, F. Levent Degertekin, +2

Journal of Microelectromechanical Systems

Materials ScienceBiomedical SensorsEngineeringMicromachinesFlexible Electronics +13

Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers

Ayhan Bozkurt, I. Ladabaum, A. Atalar, +1

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

EngineeringMechanical EngineeringElectrostatic ForceBiomedical EngineeringMicro-electromechanical System +14

Silicon micromachined ultrasonic immersion transducers

H. Tom Soh, I. Ladabaum, A. Atalar, +2

Applied Physics Letters

EngineeringPower UltrasoundUltrasonicsMicrofabricationMechanical Engineering +12

Micromachined ultrasonic transducers: 11.4 MHz transmission in air and more

I. Ladabaum, B.T. Khuri-Yakub, Dimitri Spoliansky

Applied Physics Letters

AeroacousticsEngineeringMechanical EngineeringAcoustic SensorSensor Technology +16

Microfabricated ultrasonic transducers monolithically integrated with high voltage electronics

C.M.W. Daft, S. Calmes, D. da Graca, +3

Medical ElectronicsEngineeringBiomedical EngineeringPower UltrasoundUltrasonic Transducers +15

Silicon substrate ringing in microfabricated ultrasonic transducers

I. Ladabaum, Peter Wagner, Claudio I. Zanelli, +3

AeroacousticsEngineeringExperimental ObservationPower UltrasoundUltrasonics +11

The microfabrication of capacitive ultrasonic transducers

Xuecheng Jin, I. Ladabaum, B.T. Khuri-Yakub

Successful FabricationEngineeringMicromachinesPower UltrasoundUltrasonics +12

Micromachined ultrasonic transducers (MUTs)

I. Ladabaum, B.T. Khuri-Yakub, Dimitri Spoliansky, +1

EngineeringDynamic BehaviorMicrofabricationUltrasonicsCapacitive Transducers +12