Effects of annealing temperature and Al2O3 buffer layer on ZnO thin films grown by atomic layer deposition

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Natural Sciences, Materials Engineering, Materials Science +16

Influence of Al, In, Cu, Fe and Sn dopants on the response of thin film ZnO gas sensor to ethanol vapour

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Natural Sciences, Materials Engineering, Materials Science +14

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Natural Sciences, Materials Engineering, Materials Science +16

Annealing of Al₂O₃thin films prepared by atomic layer deposition

Lei Zhang, Hai Jiang, C Liu et al. · Journal of Physics D Applied Physics · 2007 · 171 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of the variation of film thickness on the structural and optical properties of ZnO thin films deposited on sapphire substrate using PLD

Eun Sub Shim, Hong Seong Kang, Jeong Seok Kang et al. · Applied Surface Science · 2002 · 137 citations

Natural Sciences, Materials Engineering, Materials Science +17