Effects of annealing temperature and Al2O3 buffer layer on ZnO thin films grown by atomic layer deposition - Concepedia

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Effects of annealing temperature and Al2O3 buffer layer on ZnO thin films grown by atomic layer deposition

15

Citations

19

References

2009

Year

C.R. Kim, Jeong Yong Lee, J.H. Heo, Chee-Mahn Shin, T.M. Lee, J.H. Park, Hyukhyun Ryu, Jiho Chang, Chang‐Sik Son

Current Applied Physics

Materials EngineeringMaterials ScienceEngineeringNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsZno Thin FilmsThin FilmsChemical DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing

References

	Year	Citations

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