Concepedia

Publication | Closed Access

Annealing ion implanted SiC with an AlN cap

DOI

24

Citations

23

References

1999

Year

Keith Jones, Pankaj B. Shah, K. W. Kirchner, R. T. Lareau, M. C. Wood, Matthew H. Ervin, R. D. Vispute, Raj Pal Sharma, T. Venkatesan, O. W. Holland
Materials Science and Engineering B

References

YearCitations

Page 1