Concepedia

Etching characteristics of TiNi thin film by focused ion beam

D.Z. Xie, B. K. A. Ngoi, Yongqing Fu, Andrew Ong, B. H. Lim

Applied Surface Science · 2003 · 21 citations · 14 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsEtching ProcessesSemiconductor Thin FilmsThin Film Electrical PropertiesThin Film EtchingThin Film Surface MorphologyThin-film MaterialsEtch MechanismsFocused Ion Beam LithographyIon Beam EtchingSurface EtchingThin-film Coatings

References

14

Theory of ripple topography induced by ion bombardment

R. Mark Bradley, James Harper · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 1.4K citations

Natural Sciences, Materials Science, Physics +15

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra · Sensors and Actuators · 1988 · 617 citations · Full text

Engineering, Materials Engineering, Mechanical Engineering +12

The TiNi shape-memory alloy and its applications for MEMS

H. Kahn, Michael Huff, A. H. Heuer · Journal of Micromechanics and Microengineering · 1998 · 276 citations

Engineering, Materials Engineering, Materials Science +14

Smart Prestressing with Shape-Memory Alloy

Arup Maji, Ihosvany Negret · Journal of Engineering Mechanics · 1998 · 147 citations

Engineering, Materials Engineering, Materials Science +17

SMA microgripper with integrated antagonism

Manfred Kohl, E. Just, Wilhelm Pfleging et al. · Sensors and Actuators A Physical · 2000 · 140 citations

Engineering, Electrical Engineering, Mechanical Engineering +8