Concepedia

Studies of structures elaborated by focused ion beam induced deposition

M. Prestigiacomo, Luc Roussel, A. Houël, P. Sudraud, F. Bedu, D. Tonneau, V. I. Safarov, H. Dallaporta

Microelectronic Engineering · 2004 · 29 citations · 3 references

DOI

Concepts

References

3

Focused-Ion-Beam Induced Deposition Of Metal For Microcircuit Modification

Diane K. Stewart, Lewis Stern, John C. Morgan · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 32 citations

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Focused Ion Beam Induced Deposition

J. Melngailis, Patricia G. Blauner · MRS Proceedings · 1989 · 25 citations

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Characterization of focused ion beam induced deposition process and parameters calibration

Ngoi Kok Ann Bryan, Ong Nan Shing · Sensors and Actuators A Physical · 2001 · 22 citations

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