Modeling of hydrocarbon species in ECR methane plasmas

Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC

C.K. Birdsall · IEEE Transactions on Plasma Science · 1991 · 1.3K citations

Natural Sciences, Physics, Computational Physics +16

A binary collision model for plasma simulation with a particle code

T. Takizuka, Hirotada Abe · Journal of Computational Physics · 1977 · 570 citations

Natural Sciences, Computer Science, Physics +9

Surface reactions during growth and erosion of hydrocarbon films

W. Jacob · Thin Solid Films · 1998 · 353 citations

Natural Sciences, Chemistry, Materials Science +14

One-dimensional fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers

D. Herrebout, Annemie Bogaerts, Min Yan et al. · Journal of Applied Physics · 2001 · 123 citations

Natural Sciences, Physics, Molecular Physics +16

Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma

Petra Reinke, S. Schelz, W. Jacob et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 51 citations

Natural Sciences, Electrical Engineering, Microelectronics +14