D. Herrebout

One-dimensional fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers

D. Herrebout, Annemie Bogaerts, Min Yan et al. · Journal of Applied Physics · 2001 · 122 citations

Engineering, Plasma Science, Plasma Physics +27

Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a CH4/H2 capacitively coupled radio frequency discharge

V. V. Ivanov, A. T. Rakhimov, D. Herrebout et al. · Journal of Applied Physics · 2002 · 40 citations

Engineering, Glow Discharge, Particle Method +21

A one-dimensional fluid model for an acetylene RF discharge: a study of the plasma chemistry

D. Herrebout, Annemie Bogaerts, R. Gijbels et al. · IEEE Transactions on Plasma Science · 2003 · 37 citations

Engineering, Glow Discharge, Fluid Mechanics +17

One-dimensional modelling of a capacitively coupled rf plasma in silane/helium, including small concentrations of O₂and N₂

Kathleen De Bleecker, D. Herrebout, Annemie Bogaerts et al. · Journal of Physics D Applied Physics · 2003 · 33 citations

Engineering, Radio Frequency, Small Concentrations +26

Modeling of a capacitively coupled radio-frequency methane plasma: Comparison between a one-dimensional and a two-dimensional fluid model

D. Herrebout, Annemie Bogaerts, Min Yan et al. · Journal of Applied Physics · 2002 · 30 citations

Engineering, Fluid Mechanics, Plasma Physics +26