Methodology, performance, and application of an imaging x-ray photoelectron spectrometer

Abstract

The advantages of an x-ray photoelectron spectrometer designed with an integral scanning x-ray photoelectron (XP) imaging system are outlined. Such advantages, as compared with a nonimaging XP spectrometer, include rapid examination of a large area of the specimen allowing the operator to ‘‘zoom in’’ on small details of interest. Up to 20 points of interest on the sample can be unambiguously identified and full spectra obtained from them. High spatial resolution maps can also be produced. The performance of the instrument can be quickly optimized with the aid of the scanning imaging technique which provides various diagnostic features. Analytical data can be obtained in a relatively short time and depth profiling techniques show significant benefits. Details of these benefits and of the self-diagnostic features will be given as will a brief outline of an application of the new instrument.