Materials Chemistry and Physics · 1999 · 13 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface EngineeringSurface ScienceAlloysCoating TechnologyCoatingsMetalsPlasma Surface TreatmentSilicon MaterialsPlasma-assisted CoatingPulsed Plasma SourcesSilicon Nitride
8
High intensity pulsed ion beams in material processing: Equipment and applications
J. Piekoşzewski, J. Langner · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 50 citations
Natural Sciences, Materials Engineering, Materials Science +15