Thin Solid Films · 2002 · 10 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceAnalytical ChemistrySurface ChemistrySurface ScienceAuger Electron SpectroscopyChemical Vapor DepositionCoatingsMass SpectrometrySurface AnalysisSurface CoatingsAuger Electron Spectroscopy QuantificationBoride CoatingsCarbon CoatingsChemical Vapor Deposition PrecursorsElectron Probe MicroanalysisMicroanalysisSecondary Ion Mass Spectrometry
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