Characterization of carbon-boronnitride-coatings prepared with chemical vapor deposition by auger electron spectroscopy, electron probe microanalysis and secondary ion mass spectrometry

K. Gammer, Thomas Kolber, K. Piplits, K. Nowikow, X.-M. Tang, Roland Haubner, Herbert Hutter

Thin Solid Films · 2002 · 10 citations · 6 references

Concepts

References

6