Chemical vapour deposition of amorphous hydrogenated silicon with a CO2 laser: chemical mechanism

Structural interpretation of the vibrational spectra of<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>a</mml:mi></mml:math>-Si: H alloys

G. Lucovsky, R. J. Nemanich, J. C. Knights · Physical review. B, Condensed matter · 1979 · 810 citations

Natural Sciences, Materials Science, Physics +16

Oxygen-bonding environments in glow-discharge-deposited amorphous silicon-hydrogen alloy films

G. Lucovsky, J. Yang, S. S. Chao et al. · Physical review. B, Condensed matter · 1983 · 432 citations

Natural Sciences, Materials Engineering, Materials Science +17

Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface

S. M. Gates · Surface Science · 1988 · 214 citations

Natural Sciences, Materials Engineering, Materials Science +12

Absolute rate constants for the reaction of silylene with hydrogen, silane, and disilane

Joseph M. Jasinski, Jack O. Chu · The Journal of Chemical Physics · 1988 · 202 citations

Natural Sciences, Chemistry, Materials Science +17

The Infrared Spectrum of Disilane

H. S. Gutowsky, E. O. Stejskal · The Journal of Chemical Physics · 1954 · 193 citations

Natural Sciences, Chemistry, Physics +16