Publication | Closed Access
Chemical vapour deposition of amorphous hydrogenated silicon with a CO2 laser: chemical mechanism
10
Citations
16
References
1992
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsLaser ApplicationsPulsed Laser DepositionChemical Vapor DepositionChemistryChemical VapourCo2 LaserLaser-assisted DepositionChemical MechanismSilicon On Insulator
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