Sensors and Actuators A Physical · 2001 · 23 citations · 5 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsMechatronicsUltrasoundDifferential KinematicsKinematic DesignKinematicsMems ActuatorsUltrasonicsUltrasound PhysicsKinematic Chain Analysis
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A cylindrical ultrasonic micromotor based on PZT thin film