Sensors and Actuators A Physical · 1994 · 19 citations · 2 references
EngineeringSoft RoboticsFlow ControlMicrofabricationFluid MechanicsMechanical EngineeringMechanical SystemsChemical ActuatorMicroscale SystemMicroactuatorMicrofluidicsLiga TechniqueBistable Fluidic Elements
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Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations
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