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Low optical loss germanosilicate planar waveguides by low-pressure inductively coupled plasma-enhanced chemical vapor deposition

Materials SciencePhotonicsShort Wavelength OpticOptical MaterialsEngineeringOptical PropertiesApplied PhysicsGuided-wave OpticOptoelectronic DevicesPhotonic DeviceOptoelectronicsChemical Vapor DepositionPlanar Waveguide Sensor