Concepedia
Sensors and Actuators A Physical · 1990 · 20 citations · 6 references
EngineeringMaterials ScienceMechanical EngineeringSensorsForce SensorsMechanical SensorsPressure DistributionPressure ManagementPressure MeasurementPressure SensorsPressure SensingPressure Sensing SystemsPressure Sensor Linearity
6
Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors
Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations
Engineering, Materials Engineering, Mechanical Engineering +17
Nonlinearity of the piezoresistance effect of p-type silicon diffused layers
Koji Yamada, Motohisa Nishihara, Satoshi Shimada et al. · IEEE Transactions on Electron Devices · 1982 · 96 citations
Engineering, Materials Engineering, Materials Science +12
A special silicon diaphragm pressure sensor with high output and high accuracy
Michitaka Shimazoe, Yoshitaka Matsuoka, Akio YASUKAWA et al. · Sensors and Actuators · 1981 · 55 citations
Engineering, Mechanical Engineering, Sensors +12
A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water
Xian-Ping Wu, Quin-Hai Wu, Wen H. Ko · Sensors and Actuators · 1986 · 42 citations
Engineering, Materials Engineering, Materials Science +11
Design Considerations for Silicon Circular Diaphragm Pressure Sensors
Akio YASUKAWA, Satoshi Shimada, Yoshitaka Matsuoka et al. · Japanese Journal of Applied Physics · 1982 · 30 citations
Engineering, Materials Science, Mechanical Engineering +17