Concepedia
Sensors and Actuators · 1981 · 55 citations · 4 references
EngineeringMechanical EngineeringSensorsForce SensorsMechanical SensorsPressure DistributionPressure MeasurementPressure SensorsStrain SensorsAccuracyPressure SensingPressure Sensing SystemsPressure Sensor AccuracyPressure Sensor MaterialsSilicon Diaphragms
4
A graphical representation of the piezoresistance coefficients in silicon
Yozo Kanda · IEEE Transactions on Electron Devices · 1982 · 897 citations
Natural Sciences, Materials Engineering, Materials Science +10
Piezoresistive Properties of Silicon Diffused Layers
O. N. Tufte, E. L. Stelzer · Journal of Applied Physics · 1963 · 353 citations
Engineering, Materials Engineering, Materials Science +16
Silicon Diffused-Element Piezoresistive Diaphragms
O. N. Tufte, P. W. Chapman, Donald Long · Journal of Applied Physics · 1962 · 268 citations · Full text
Engineering, Materials Engineering, Materials Science +17
Nonlinearity of the piezoresistance effect of p-type silicon diffused layers
Koji Yamada, Motohisa Nishihara, Satoshi Shimada et al. · IEEE Transactions on Electron Devices · 1982 · 96 citations
Engineering, Materials Engineering, Materials Science +12