Concepedia

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Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications

DOI

55

Citations

3

References

1992

Year

Jean‐Luc Deschanvres, Patrice Rey, G. Delabouglise, M. Labeau, J.C. Joubert, J.C. Peuzin
Sensors and Actuators A Physical

References

YearCitations

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