Concepedia

Thermalization of the flow of sputtered target atoms during ion-plasma deposition of films

Valery A. Volpyas, Roman Platonov, A. B. Kozyrev

Physics Letters A · 2014 · 12 citations · 11 references

DOI

Concepts

References

11

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

, , +15

Calculation of deposition rates in diode sputtering systems

W. D. Westwood · Journal of Vacuum Science and Technology · 1978 · 291 citations

, , +13

Thermalization of sputtered atoms

Kevin Meyer, Iván K. Schuller, Charles M. Falco · Journal of Applied Physics · 1981 · 245 citations

, , +17

Sputtering by Particle Bombardment

R. Behrisch, W. Eckstein · 2007 · 148 citations

, , +5

Monte Carlo calculation of the thermalization of atoms sputtered from the cathode of a sputtering discharge

G. M. Turner, I. S. Falconer, B. W. James et al. · Journal of Applied Physics · 1989 · 136 citations

, , +16