Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 15 citations · 6 references
EngineeringManufacturing EngineeringMechanical EngineeringInstrumentationMaterials CharacterizationMetrologyAtomic Force MicroscopyCurve FittingForm MeasurementMachiningAtomic Force Microscopy AnalysisAtomic Force Microscopy MetrologyMachine Tool MetrologyPeak-to-valley HeightPrecision CuttingRoundness Measurement
The nose roundness is one of the most important indices of lapping quality of circular-arc diamond cutting tools. Because of its special requirements, until now there was no efficient method to measure the nose roundness. In this article, a new way, based on atomic force microscope and precision-revolution axis, to measure the nose arc of tools is proposed. A radius constraint least-squares circle fitting method is put forward. The metrical data are fitted by the nonlinear fitting function Lsqnonlin in software matrix laboratory (MATLAB). Also, the peak-valley value is used to assess the nose roundness. The method fully meets the needs of measurement and evaluation of circular-arc diamond cutting tools’ nose roundness.
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Least-squares fitting of circles and ellipses
Walter Gander, Gene H. Golub, Rolf Strebel · BIT Numerical Mathematics · 1994 · 850 citations
Lapping of Single Crystal Diamond Tools
Zhe Yuan, Yongtao Yao, Ming Zhou et al. · CIRP Annals · 2003 · 48 citations