Applied Physics Letters · 2011 · 88 citations · 10 references
EngineeringMaterials SciencePhysicsElectronic MaterialsHeat TransferSensorsHigh-temperature MaterialsMems SensorsTemperature MeasurementTemperature SensorsThermal Properties Of MaterialsThermal SensorsResonant FrequencySiliconSilicon NitrideTemperature Response ModelingTemperature SensingTemperature SensitivityTemperature Sensor MaterialsTemperature Sensor Sensitivity
Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured. The relative change in resonant frequency per temperature change of −1.74±0.04%/°C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.
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Review of temperature measurement
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