Publication | Closed Access

Characterization of Cr–Al–C and Cr–Al–C–Y films synthesized by High Power Impulse Magnetron Sputtering at a low deposition temperature

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsThin Film Process TechnologyCr–al–c–y FilmsThin FilmsThin Film ProcessingLow Deposition Temperature