Physica B Condensed Matter · 2010 · 26 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsSurface ScienceThin FilmsCoatingsOptical Thin FilmsSurface OxidationSurface PhysicsThin Film Optical PropertiesThin-film MaterialsOptical PropertiesOxygen Partial Pressure EffectsReactive SputteringSputteringSputtering ProcessesSurface Optical PropertiesThin Oxide FilmsThin Oxide Layers
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