Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

Abstract

We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations.